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Handbook of Plasma Processing Technology : Fundamentals, Etching, Deposition, and Surface Interactions (Materials Science and Process Technology) |
List Price: $116.00
Your Price: $116.00 |
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Reviews |
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Rating: 
Summary: Lacking detailed description of the plasma-kinetic model
Review: Fair overview of basic plasma processing techniques. Because it's written by various experts in the field, the quality varies from chapter to chapter. The section on reactive ion etching comes highly recommended and is thoroughly referenced.
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