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Rating: 
Summary: Strongly advise against
Review: I am a graduate student in engineering and have never encountered a less understandable book. The author repeatedly offers equations without proof or explaination of variables, frequently changes notation without notifying the reader, and has included far too many errors for a second edition book (ie eqn 3.11, a very important eqn). The problems at the end of the chapters frequently require equations that are not presented in the text (either omitted or included with errors) or that do not correspond to included graphs (check out fig 3.4 and see if you can tell which is GaAS and which is Silicon...then if you're ambitious check out the equation that corresponds to this figure and see if you can figure out whether the plot is correct or the equation is correct). Overall I have been very frustrated by the haphazard way in which this subject has been treated. If you have a class that uses this book, I suggest you get a another book to answer the questions that this one raises (Jaeger for example).
Rating:
Summary: Strongly advise against
Review: I am a graduate student in engineering and have never encountered a less understandable book. The author repeatedly offers equations without proof or explaination of variables, frequently changes notation without notifying the reader, and has included far too many errors for a second edition book (ie eqn 3.11, a very important eqn). The problems at the end of the chapters frequently require equations that are not presented in the text (either omitted or included with errors) or that do not correspond to included graphs (check out fig 3.4 and see if you can tell which is GaAS and which is Silicon...then if you're ambitious check out the equation that corresponds to this figure and see if you can figure out whether the plot is correct or the equation is correct). Overall I have been very frustrated by the haphazard way in which this subject has been treated. If you have a class that uses this book, I suggest you get a another book to answer the questions that this one raises (Jaeger for example).
Rating: 
Summary: Excellent book on semiconductor microfabrication
Review: I have been using this book since 1997. It is a great book, especially for those with very little knowledge in microelectronics. Reader with non-technical background can easily understand the materials. Lots of picture & diagrams to further enhance understanding. It has helped me with my postgraduate studies, a must for those who wants to know about microelectronics and a good referrence for all.
Rating:
Summary: Microfabrication equipment explained!
Review: I used this text in a senior-level microelectronics fabrication course and rate it highly. It is a thorough and up to date reference for nearly ALL aspects of modern fabrication technology. The fundamentals like wafer growth, diffusion, oxidation and implantation are covered in the first 5 chapters. Some of this material can be overly technical for those with little background, but I found the tables, diagrams and plots quite helpful. The rest of the text is broken into sections on patterning (optical and nonoptical lithography, etching,) thin films (evaporation, sputtering, CVD, epitaxial growth,) and process integration (CMOS, GaAs, device technology, bipolar, MEMS.) Each of the subtopics I noted is given a chapter's worth of coverage, so plenty of detail is presented. I think it's a great technical reference and a definite keeper.
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