Modeling MEMS and NEMS

Rating:
Summary: Finally a comprehensive book
Review: This is among the finest books for modeling MEMS. Most other books give a mish-mash of fabrication and modeling, but you never figure out how to model!! This one is different. This is the gold standard for MEMS books to come.. I picked it up along with many other MEMS books from the library, never thought I would use it, but this is the ONLY book I use. Good even for the the advanced MEMS designer as a quick reference. But great for a new reader who wants to grasp the fundamental of modeling.