Plasma Etching: Fundamentals and Applications (Series on Semiconductor Science and Technology, 7)

Rating:
Summary: understanding plasma processes
Review: Gives a detailed physical understanding on the fundamentals of plasma processes including Inductively Coupled Plasma and current advancements in etching processes.

Rating:
Summary: ECR Plasma Etching
Review: One of the only books available that contain theoretical and practicle information on ECR etching. A must for any etch engineers working in the semiconductor industry.