Plasma Processes for Semiconductor Fabrication

Rating:
Summary: Excellent resource for plasma physics
Review: This book is an excellent tool for understanding the fundamental phenomenon that occur inside low density plasmas commonly used for semiconductor fabrication.

Rating:
Summary: Plasma Processes for Semiconductor Fabrication
Review: This book is outstanding if you are interested in a great deal of plasma physics. If you are looking for information regarding device processing, I think that the book does not offer too much. However, there is some information on Si processing specifically.